MEMS Mirror

What is MEMS?

MEMS is an abbreviation for

Micro

Electro

Mechanical

Systems

MEMS is an abbreviation for "Micro Electro Mechannical System" and it is a device/system that includes sensors and actuators.
They incorporates tiny electrical and mechanical elements on a single substrate by applying various microfabrication technologies such as semiconductor manufacturing technology and laser processing technology.

MEMS is a small machine having the following features;

  • Space Saving
  • Energy Saving
  • Resource Saving

What is MEMS Mirror?

| MEMS Mirror driving method |

MEMS Mirror is actuated by;
piezoelectric, electromagnetic, and electrostatic driving method.

MEMS

Scanning Mirror

  • Piezoelectric
    method
    A method to actuate mirror by the warping motion caused by application of voltage transmitted to the mirror through the hinge, which is caused by a piezoelectric film deposited on a silicon wafer.
  • Electromagnetic
    method
    A method to actuate mirror by passing an electric current through a coil around the mirror in the magnetic field of a magnet.
  • Electrostatic
    method
    A method to actuate mirror by electrostatic actuators at both ends of the mirror.

Stanley Electric's MEMS Mirror: Applying Piezoelectric Method

Downsizing: Output power of piezoelectric method becomes more superior as size decreases.

Size and output / comparison with other actuator methods (image)
Stanley Electric's MEMS Mirror is applying the piezoelectric method.

| Structure and actuation of MEMS Mirrors |

Advantages of Stanley Electric's MEMS Mirror

  • Capable of high temperature operation:
    Original piezoelectric filming technology -high manufacturing technology-
  • High resistance to external vibration:
    Patented bellows (actuator) structure -high device designing technology-
  • Enables downsizing:
    Original piezoelectric filming technology
  • → Stanley Electric offers highly reliable MEMS Mirror products through its seamless process from "design and deposition to device manufacturing."

| Structure and actuation of MEMS Mirrors |

Piezoelectric method Electromagnetic method Electrostatic method
Device Appearance
Power per unit ●
High
106 - 107N/m2		 △
Low
101 - 103N/m2		 △
Low
101 - 104N/m2
Operating environment temperature ●
Automotive qualified
125°C or lower		 ×
Non automotive qualified
100°C or lower		 ●
Automotive qualified
150°C or lower
Seismic Dynamic Resistance ●
Automotive qualified
High		 ●
Automotive qualified
High		 ×
Non automotive qualified
Low
Stanley Electric's MEMS Mirror that Meet Automotive Quality Standards

Markets and Applications

Applications where MEMS Mirrors may be used include headlamps, intelligent lighting, mobile projectors, and AR glasses.

Illumination/Lighting

Headlamps
Lighting
Projector

Imaging + New application

Head Up Display
AR glass / Smart glass / Mobile devices
Road projection lamp

Projector

  • Projectors using RGB lasers and MEMS Mirrors enable focus-free image projection, and high color gamut regardless of the shape of the projection target (unevenness, distance).
  • Taking advantage of its small size, the projector function can be embedded in small mobile devices.
Projection principle:
  • The image is projected by reflecting and controlling the scanning of RGB tri-color laser beams with a MEMS Mirror device.
  • The use of lasers as the image light source enables focus-free, wide color gamut expression from near to far distances.

| MEMS Mirror Projection Principle |

MEMS Mirror Projection Principle

| Demonstration of Raster Scanning |

AR Glass

  • Stanley Electric's highly reliable MEMS Mirrors can also be used in medical AR glasses, for people with low vision and other applications to support their daily lives.
  • AR glasses are expected to be a next-generation communication platform, and their convenience is expected to increase further along with the evolution of communication technologies such as 5G and 6G.
  • AR glasses are composed of display light source devices and optical devices. Display light sources generate information images, and optical devices reflect and transmit those information images to the user.
  • Laser beam scan (LBS) is one of the display light source devices.This method is used in combination with our MEMS Mirrors.
flow

| Laser beam scanning method |

Lighting

  • Achieving active laser irradiation, that can freely manipulate light and change the irradiated area as needed.
  • None mechanical parts are used (motors nor other actuators).
    → Downsizing is available. Capable of "spreading," "collecting," and " controlling" light as needed.
  • Applications:
    Stage lighting for entertaining purposes, emergency lighting, security lighting, adaptive headlights for automobiles, etc.
・Wide range of irradiation angles
・Adjustable light intensity
・Adjustable irradiation position and shapes

| Laser beam scanning method |

Laser beam scanning method

| Image of projecting |Capable of forming random shapes and high-brightness areas

Image of projecting: Capable of forming random shapes and high-brightness areas

Lineup of MEMS Mirror
(Under Development)

Spec of MEMS Mirror Device (Reference Range)

Model 1 Model 2 　
Parameter Symbol Data value Data value Unit Remark
Min Typ. Max Min Typ. Max
H-axis Resonant Frequency fh 35 36.5 38 21 21.5 22 kHz 　
Driving voltage Vh 11 13.6 17.3 9.9 13.5 18.8 V Sinusoidal wave (Resonance mode), at Maximum mechanical deflection angle
Mechanical deflection angle Θh -11 - +11 -10 - +10 degree 　
V-axis Resonant Frequency fv - 736 - - 1,074 - Hz 　
Driving voltage Vv 41 52.3 63.5 35.7 47.1 58.5 V Sawtooth wave or Triangular wave (Non-resonant mode), at Maximum mechanical deflection angle
Mechanical deflection angle Θv -6 - +6 -3 - +3 degree 　
Mirror Size A Φ1.06 Φ1.46 × 1.61 mm 　
Reflectivity B Rb 90 - - 96 - - % 440-460nm
Reflectivity G Rg 90 - - - - - % 510-525nm
Reflectivity R Rr 90 - - - - - % 632-643nm
Resolution 1,219 x 840 1,164 x 467 p 　
  • Please note that these specifications are subject to change without notice.
The optical deflection angle is twice the mechanical deflection angle.

Spec of MEMS Mirror Package (Reference Range)

Metal package Ceramic package
Parameter Data value Data value Unit Remark
Min Typ. Max Min Typ. Max
Incident angle of LD 　 17.5 　 　 45 　 degree 　
Operating temperature -40 - 125 -10 - 70 ℃ No dew condensation
Storage temperature -40 - 125 -40 - 125 ℃ No dew condensation
Package size 42.1 x 10 x 4.26 15.6 x 7.8 x 2.52 mm 　
Weight 4.9 0.8 g 　
  • Please note that these specifications are subject to change without notice.

We are available prototype products from the above lineup of 2 models and 2 packages, a total of 4 patterns.
Would you please feel free to contact us if you have any requests or questions.

To Product Information